Abstract: Dust collected from the inside and outside of an inductively coupled plasma atomic emission spectrometer (ICP-OES) was analyzed inoder to obtain the morphology and particle size of dust. By adding protection appliances to the external and internal system of ICP-OES such as air circulation and filtration systems, the frequency of maintenance equipment was dramatically decreased and the routine maintenance costs was decreased too. Furthermore, the life of the instrument was extend after the reform of ICP-OES, and a reference was provided for other large-scale precision instruments and equipment.