Abstract: Polymerase chain reaction(PCR) is an important technique of DNA amplification in vitro,which has been widely applied to the field of biological chemistry,analytical chemistry and molecular biology.Great interests have been attracted onto the PCR bio-microfluidical chips fabricated by microelectromechanical system(MEMS)technology due to their many advantages such as fast reaction rate,little sample consumption and small footprint.However,its corresponding high surface-to-volume ratio and the utilized bare substrate material usually inhibit PCR amplification reaction which will lead to non-access to successful PCR amplification.In this review,the systematic description involves the surface inactivation technology used in the PCR microfluidical chip in order to acquire the "friend" surface to PCR reaction,including the necessity of surface inactivation,static/dynamic inactivation,mechanism of PCR inhibition by silicon-related materials and so on.