E-alert

JEOL JSM-35C型扫描电子显微镜故障及排除

Faults Study and it Solution of JEOL JSM-35C Scanning Microscope

    摘要
  • 摘要: 在介绍真空系统联锁控制流程图的基础上,选择了粗真空系统抽力变差、进样系统泄漏、真空联锁保护电路误动作、二次电子检测高压电路故障、二次电子检测电路故障、倍率放大器故障和图象放大倍率校正等七个有代表性的、已排除的故障实例进行深入分析研究,提出排除故障的思路和办法.

     

    Abstract: The diagram of vacuum control is introduced. Typical faults occurred are analyzed and Studied thoroughly. Ideas to resolve these faults are given.

     

    • HTML全文
    • 参考文献(0)
    • 相关文章
    • 施引文献
  • 资源附件(0)

/

返回文章
返回