理学D/MAX—1400全自动X射线衍射仪真空及其控制电路故障部位判定和排除

Faults Study and Solution of Vacuum System and their Controller on the Rigaku D/MAX-1400 X-ray Diffractometer

摘要: 在简要介绍真空控制流程图的基础上,选择了TMP轴承受损、TMP叶轮打烂、电路参数改变TMP加速过快OLL报警烧保险、转靶磁密封不良VAC1报警、供电缺相过流保护和真空控制放大器自激离子规衰老等6个有代表性的、已排除的故障实例进行深入分析研究,提出了排除故障的思路和办法.

Abstract: The diagram of vacuum control is introduced. Typical faults occurred are analyzed and studied thoroughly. Ideas to resolve these faults are given.