Digisorb 2600型物理吸附仪真空系统检漏、故障分析及对策
Leak-ChecK, Fault Analysis and Countermeasure of Digisorb 2600 Vacuum System
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摘要: 就Digisorb2600型物理吸附仪的真空系统拟出了表格形式的基本检漏步骤,并在此基础上详细介绍了几例特殊真空故障的查找、分析及解决方法.Abstract: The digisorb 2600 vacuum system is introduced briefly, the table of leak-check procedure of each value is made. Based on the table, several particular vacuum faults are analyzed and studied deeply, and the methods to resolve these faults are given.