BAIRD Ps-6真空型电感耦合等离子发射光谱仪的故障分析与对策

The Faults Analysis and Their Solution of Baird Ps-6 Plasma Spectrometer

摘要: 对Ps-6型光谱仪作了简介的基础上,从联锁保护电路入手,选择了射频(RF)发生器.相检测电路、气路、真空系统、光路准直监视系统、光电倍增管和高压电路等八例有代表性、已排除的故障实例深入进行分析研究,提出了排除故障的思路与办法.

Abstract: The Plasma Spectrometer Ps-6 is introduced briefly. Based on the Link-lock protect circuit, typical faults occurred in RF generator, phase detector, gas supply system, vacuum system, optical alignment monitor system,PMT, high voltage supply etc. are analyzed and studied thoroughly. And ideas to resolve these faults are given.