一种简易扩散泵封闭式加热器

A Type of Simple Enclosed Heat Booster of Diffusion Pump

摘要: 介绍了一种用于电镜扩散泵(DP)的封闭式加热器,它具有结构简单、安装及检修方便,成本低廉等特点.该装置适应于JEM-200CX电镜及JEE-4X真空喷镀仪配置,近年来的使用证明该装置完全可以替代原装进口封闭式加热器.

Abstract: Introduced the development of the enclosed heat booster of diffusion pump using for TEM. The heat booster is characterized by its simplicity, convenience and lower cost. It's suitable for JEM-200CX TEM and JEE-4X Vacuum Evaporator. The application results show that it can completely take the place of the imported enclosed heat booster with original packaging.