JEE—4x型真空镀膜仪功能扩展

Function Development of JEE-4x Vacuum Evaporator

摘要: 报道了对JEE-4x型真空镀膜仪蒸发装置的改进以及建立蒸发材料回收装置的具体方法,并介绍了改进后该仪器在高分辨扫描电镜样品制备上的应用实例。实验证明,上述改进不但扩展了JEE-4x型真空镀膜仪的制样功能又节省了蒸发材料,集中了离子溅射法及常规高真空镀膜法的优点,完全满足SEM样品的分析要求,该方法简单易操作。

Abstract: The JEE-4x Vacuum Evaporator is modified.The improved set can expand the original sample preparation function and save the material for evaporation.The developed is simple and easy to operate.It has the advantage of both the ion-sputtering method and the normal high vacuum plating method and can meet the requirement of SEM anlysis.