Abstract: The analytical performance of axial-view ICP-AES on analysis of rare earth elements (REE) has been in this artical. In comparison with the normal ICP-AES, both output power of high frequency generator and flow rate of carrier gas do not give aopparent difference on effection their exciting characteristics, so the infleuences of these two parameters on sensitivities of REE determination are nearly the same. But the lighting modes of two ICP's are different, thes is why the axial-view ICP-AES can give more sensitive detection. The axial-view ICP-AES lights along whole axis in ICP thus avoiding the radiation of annular heating area in.ICP so that its detection limits of REE can be lowered in comparison with that obtained with normal ICP-AES. Experimental results indicate that detection limits of REE in axial-view ICPAES are lowered to about 10 to 30 of that obtained in normal ICP.