Abstract: The tungsten filament scanning electron microscope is of low price and maintenance cost, wide applicability of samples, and high utilization rate in various research institutions. Its routine maintenance is a necessary means to ensure the performance of tungsten filament scanning electron microscope. In addition to the conventional scanning electron microscope maintenance, there are some maintenance points that are different from other types of scanning electron microscope due to the structural characteristics of the tungsten filament scanning electron microscope. Taking EVO MA 15 tungsten filament scanning electron microscope as an example, the specific methods of routine maintenance of tungsten filament scanning electron microscope were introduced from three aspects of electron optical system, vacuum system and imaging system, so as to provide reference for pepole of the same trade.