Abstract: A method for the determination of impurity elements in ruthenium trichloride solution by the inductively coupled plasma atomic emission spectrometry has been established. The ruthenium matrix was converted into ruthenium tetrachloride by adding an oxidant to volatilize the sample to eliminate the matrix interference. The experimental conditions such as oxidant, acidity and determination spectrum were optimized. The results showed that the relative standard deviations (RSD, n=7) of the determination results of each impurity element were less than 5.00%, and the spiked recovery of the method was 90.0%~106.0%. The method is of high accuracy and good repeatability, which can meet the actual production needs.