Abstract: In order to improve the heating and temperature measurement method of the sample heating stage made by the molecular beam epitaxy (MBE) equipment produced by SPECS in Germany, the direct current (DC) heating was added to the original thermal radiation heating and infrared temperature measurement. The proportional integral derivative (PID) precision temperature control device is used to measure and control the temperature of the sample heating platform. After the improvement, the proportional integral derivative (PID) precision temperature control device is used to measure and control the temperature of the sample heating platform. And the range of research samples that can be prepared by the original equipment is wider, the research direction around the equipment is increased, the scope of use of the equipment is expanded.