Abstract: A set of high ionization energy element sample injection system of inductively coupled plasma optical emission spectrometry (ICP-OES) was designed and developed. The system not only retains the original detection function of ICP-OES, but also combines the physical method of ultrasonic vibration cavitation with the chemical method of hydride generation, to effectively increase the detection concentration of elements to be measured in an unit volume, so that the detection sensitivity of high ionization energy elements can be increased by 3~5 times on the original basis. The development of the system extends the detection function of ICP-OES for high ionization energy elements.