Abstract: X-ray photoelectron spectroscope(XPS) is a crucial tool in the surface analysis field, the rapid development of XPS in recent years has promoted the research of surface chemistry. The correct usage and well maintenance not only can ensure the equipment always under good operating condition, but also can extend equipment life. In this article, some key points on the maintenance and management of XPS, based on the laboratory experiences of the author were described, which will be helpful to the maintaining workers, operators and related ones.